1. School of Chemical Engineering, Guizhou Minzu University, Guiyang 550025, China
2. State Key Laboratory of Advanced Materials for Smart Sensing, GRINM Group Co., Ltd., Beijing 100088, China
3. GRIMAT Engineering Institute Co., Ltd., Beijing 101407, China
4. GRINM (Guangdong) Institute for Advanced Materials and Technology, Foshan 528051, China
5. Advanced Integrated Circuits R&D Center, Institute of Microelectronic of the Chinese Academy of Sciences, Beijing 100029, China