High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Link
http://www.mdpi.com/1424-8220/18/7/2055/pdf
Reference20 articles.
1. An integrated GPS/MEMS-IMU navigation system for an autonomous helicopter
2. An intelligent and autonomous MEMS IMU/GPS integration scheme for low cost land navigation applications
3. A Standard Testing and Calibration Procedure for Low Cost MEMS Inertial Sensors and Units
4. No Physical Stimulus Testing and Calibration for MEMS Accelerometer
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1. Micro-Opto-Electro-Mechanical Systems for High-Precision Displacement Sensing: A Review;Micromachines;2024-08-06
2. Impacts of Residual Stress on Micro Vibratory Platform Used for Inertial Sensor Calibration;Sensors;2020-07-16
3. Acceleration measurement by spectrum of interference signal of self-mixing laser;Saratov Fall Meeting 2019: Laser Physics, Photonic Technologies, and Molecular Modeling;2020-04-09
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