Effect of Energy and Temperature on Tetrahedral Amorphous Carbon Coatings Deposited by Filtered Laser-Arc

Abstract

In this study, both the plasma process of filtered laser-arc evaporation and the resulting properties of tetrahedral amorphous carbon coatings are investigated. The energy distribution of the plasma species and the arc spot dynamics during the arc evaporation are described. Different ta-C coatings are synthesized by varying the bias pulse time and temperature during deposition. An increase in hardness was observed with the increased overlapping of the bias and arc pulse times. External heating resulted in a significant loss of hardness. A strong discrepancy between the in-plane properties and the properties in the film normal direction was detected specifically for a medium temperature of 120 °C during deposition. Investigations using electron microscopy revealed that this strong anisotropy can be explained by the formation of nanocrystalline graphite areas and their orientation toward the film’s normal direction. This novel coating type differs from standard amorphous a-C and ta-C coatings and offers new possibilities for superior mechanical behavior due to its combination of a high hardness and low in-plane Young’s Modulus.