1. National Institute for Research and Development in Microtechnologies-IMT Bucharest, 077190 Bucharest, Romania
2. Doctoral School of Electronics, Telecommunications and Information Technology, National University of Science and Technology POLITEHNICA Bucharest, 061071 Bucharest, Romania
3. NANOM MEMS SRL, Strada George Cosbuc 9, 505400 Brasov, Romania
4. Center of Materials Technology and Photonics, School of Engineering, Hellenic Mediterranean University, 71410 Heraklion, Greece
5. Faculty of Mechanical and Electrical Engineering, Petroleum and Gas University of Ploiesti, 100680 Ploiesti, Romania