Comparative Investigations of AlCrN Coatings Formed by Cathodic Arc Evaporation under Different Nitrogen Pressure or Arc Current

Abstract

Tools and machine surfaces are subjected to various types of damage caused by many different factors. Due to this, the protecting coatings characterized by the best properties for a given treatment or environment are used. AlCrN coatings with different compositions, synthesized by different methods, are often of interest to scientists. The aim of the presented work was the deposition and investigation of two sets of coatings: (1) formed in nitrogen pressure from 0.8 Pa to 5 Pa and (2) formed at arc current from 50 A to 100 A. We study relationships between the above technological parameters and discuss their properties. Coatings formed at nitrogen pressure (pN2) up to 3 Pa crystallize both in hexagonal AlN structure and the cubic CrN structure. For pN2 > 3 Pa, they crystallize in the CrN cubic structure. Crystallite size increases with nitrogen pressure. The coatings formed at different arc currents have a cubic CrN structure and the crystallite size is independent of the current. The adhesion of the coatings is very good, independent of nitrogen pressure and arc current.