Author:
Wu Rongbo,Wang Min,Xu Jian,Qi Jia,Chu Wei,Fang Zhiwei,Zhang Jianhao,Zhou Junxia,Qiao Lingling,Chai Zhifang,Lin Jintian,Cheng Ya
Abstract
In this paper, we develop a technique for realizing multi-centimeter-long lithium niobate on insulator (LNOI) waveguides with a propagation loss as low as 0.027 dB/cm. Our technique relies on patterning a chromium thin film coated on the top surface of LNOI into a hard mask with a femtosecond laser followed by chemo-mechanical polishing for structuring the LNOI into the waveguides. The surface roughness on the waveguides was determined with an atomic force microscope to be 0.452 nm. The approach is compatible with other surface patterning technologies, such as optical and electron beam lithographies or laser direct writing, enabling high-throughput manufacturing of large-scale LNOI-based photonic integrated circuits.
Funder
National Natural Science Foundation of China
Subject
General Materials Science,General Chemical Engineering
Cited by
125 articles.
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