Author:
Wang Jin,Pan Yijie,Gao Jianxin,Zhang Cheng,Qu Zhier,Xu Tongtong,Shen Yang,Qu Jifeng
Abstract
Photonic-based thermometers have been attracting intense research interest as a potential alternative to traditional electrical thermometers due to their physical and chemical stability and immunity to electromagnetic interference. However, due to the high requirements for the stability of the laser source, the existing studies on resolution are only theoretical predictions and do not include real-measured results. In this paper, we report on the fabrication and characterization of an on-chip silicon whispering-gallery-mode (WGM) ring resonator thermometer. The strip grating and the ring structure were fabricated on the silicon-on-insulator (SOI) substrate by two-step etching. The quality-factor (Q-factor), temperature sensitivity, and measurement range of the packaged device were 21,400, 42 pm/K, and 150 K, respectively. The real-measured temperature resolution of 2.9 mK was achieved by virtue of the power and polarization stabilization of the laser source.
Funder
National Natural Science Foundation of China
Subject
Fluid Flow and Transfer Processes,Computer Science Applications,Process Chemistry and Technology,General Engineering,Instrumentation,General Materials Science
Cited by
5 articles.
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