Abstract
This paper is concerned with plasma diagnosis on a N2-H2 gas mixture to determine the optimum parameters for the nitriding process. Plasma parameters such as pressure, RF-voltage, and DC-bias were varied for optimization. The active species such as N2+ and NH were identified in plasma diagnosis. In the N2-H2 gas mixture, hydrogen imposed a great influence on plasma generation. The small addition of a hydrogen molecule into the gas mixture resulted in the highest yield of N2+ ions and NH radicals; the optimum hydrogen content was 20% in the mixture. The austenitic stainless-steel type AISI304 was nitrided at 673 K and 623 K to experimentally demonstrate that hydrogen gas content optimization is necessary to improve the surface hardness and to describe low temperature nitriding under high nitrogen flux at the surface.
Subject
Fluid Flow and Transfer Processes,Computer Science Applications,Process Chemistry and Technology,General Engineering,Instrumentation,General Materials Science
Cited by
11 articles.
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