A Novel Terahertz Metamaterial Microfluidic Sensing Chip for Ultra-Sensitive Detection

Abstract

A terahertz metamaterial microfluidic sensing chip for ultrasensitive detection is proposed to investigate the response of substances to terahertz radiation in liquid environments and enhance the molecular fingerprinting of trace substances. The structure consists of a cover layer, a metal microstructure, a microfluidic channel, a metal reflective layer, and a buffer layer from top to bottom, respectively. The simulation results show that there are three obvious resonance absorption peaks in the range of 1.5–3.0 THz and the absorption intensities are all above 90%. Among them, the absorption intensity at M1 = 1.971 THz is 99.99%, which is close to the perfect absorption, and its refractive index sensitivity and Q-factor are 859 GHz/RIU and 23, respectively, showing excellent sensing characteristics. In addition, impedance matching and equivalent circuit theory are introduced in this paper to further analyze the physical mechanism of the sensor. Finally, we perform numerical simulations using refractive index data of normal and cancer cells, and the results show that the sensor can distinguish different types of cells well. The chip can reduce the sample pretreatment time as well as enhance the interaction between terahertz waves and matter, which can be used for early disease screening and food quality and safety detection in the future.