A Comb-Based Capacitive MEMS Microphone with High Signal-to-Noise Ratio: Modeling and Noise-Level Analysis
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Published:2017-08-08
Issue:4
Volume:1
Page:346
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ISSN:2504-3900
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Container-title:Proceedings
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language:en
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Short-container-title:Proceedings
Author:
Anzinger SebastianORCID,
Manz Johannes,
Dehe Alfons,
Schrag Gabriele
Cited by
2 articles.
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1. Non-Linear Behavioral Modeling of Capacitive MEMS Microphones;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15
2. Condenser MEMS Microphone;Russian Microelectronics;2020-01