Additive Manufacturing Electronics for Packaging High-Frequency Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducer Probes-Reference-Cited by-同舟云学术

Additive Manufacturing Electronics for Packaging High-Frequency Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducer Probes

Published:2024-03-18 Issue: Volume:4 Page:52
ISSN:
Container-title:Eurosensors 2023
language:
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Author:

Mastronardi Vincenzo Mariano¹²^ORCID,Qualtieri Antonio²^ORCID,Boni Enrico³^ORCID,Tortoli Piero³^ORCID,De Fazio Roberto¹^ORCID,Visconti Paolo¹²^ORCID,Todaro Maria Teresa²⁴,De Vittorio Massimo¹²

Affiliation:

1. Department of Innovation Engineering, University of Salento, 73100 Lecce, Italy

2. Center for Biomolecular Nanotechnologies, Istituto Italiano di Tecnologia, 73010 Arnesano, Italy

3. Dipartimento di Ingegneria dell’Informazione, University of Florence, 50139 Florence, Italy

4. Institute of Nanotechnology, National Research Council, 73100 Lecce, Italy

Publisher

MDPI

Link

https://www.mdpi.com/2504-3900/97/1/52/pdf

Reference13 articles.

1. Atheeth, S., Krishnan, K., and Arora, M. (2023). Review of pMUTs for medical imaging: Towards high frequency arrays. Biomed. Phys. Eng. Express, 9.

2. Brenner, K., Ergun, A.S., Firouzi, K., Rasmussen, M.F., Stedman, Q., and Khuri–Yakub, B. (2019). Advances in Capacitive Micromachined Ultrasonic Transducers. Micromachines, 10.

3. Fabrication and testing of polymer-based capacitive micromachined ultrasound transducers for medical imaging;Gerardo;Microsyst. Nanoeng.,2018

4. Pala, S., and Lin, L. (2020, January 7–11). Piezoelectric Micromachined Ultrasonic Transducers (pMUT) with Free Boundary. Proceedings of the 2020 IEEE International Ultrasonics Symposium (IUS), Las Vegas, NV, USA.

5. Piezoelectric Micromachined Ultrasound Transducer (PMUT) Arrays for Integrated Sensing, Actuation and Imaging;Qiu;Sensors,2015