MEMS Valves with Molecular Flow Regime Orifices

Author:

Bagolini Alvise1ORCID,Correale Raffaele2,Picciotto Antonino3,Lorenzelli Leandro1ORCID

Affiliation:

1. MicroSystems Technology Group, CMM, Fondazione Bruno Kessler, 38123 Trento, Italy

2. Nanotech Analysis SRL, Corso Umberto 65, 10128 Torino, Italy

3. Micro-Nano Facility Group, CMM, Fondazione Bruno Kessler, 38123 Trento, Italy

Publisher

MDPI

Reference6 articles.

1. Nanofluidic delivery of molecules: Integrated plasmonic sensing with nanoholes;Gramotnev;Microfluid. Nanofluidics,2013

2. Lafferty, J.M. (1998). Foundation of Vacuum Science and Technology, John Wiley & Sons, Inc.

3. Correale, R. (2017, January 24). A new generation of nanotechnological instruments: Application to Homeland Security domain. Proceedings of the 8th National Conference on Cyber Warfare (CWC), Information Warfare vs Cyber Warfare: Differences and Applications, Milan, Italy.

4. Correale, R. (2017, January 21–23). A nanotechnology approach for the realization of a novel generation of miniature and portable analytical instruments. Proceedings of the Euro Nano Forum 2017 Conference, Valletta, Malta.

5. Production of the molecular Dication ArN2+ ions in the Reaction Ar2+ + N2;Tosi;Phys. Rev. Lett.,1999

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