Design and Fabrication of Micro/Nano Sensors and Actuators-Reference-Cited by-同舟云学术

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Design and Fabrication of Micro/Nano Sensors and Actuators

Published:2024-05-22 Issue:6 Volume:15 Page:674
ISSN:2072-666X
Container-title:Micromachines
language:en
Short-container-title:Micromachines

Author:

Wang Weidong¹^ORCID,Yang Ruiguo²,Liu Min¹^ORCID

Affiliation:

1. School of Mechano-Electronic Engineering, Xidian University, Xi’an 710071, China

2. Department of Mechanical and Materials Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA

Abstract

A micro-electromechanical system (MEMS) is a micro device or system that utilizes large-scale integrated circuit manufacturing technology and microfabrication technology to integrate microsensors, micro-actuators, microstructures, signal processing and control circuits, power supplies, and communication interfaces into one or more chips [...]

Publisher

MDPI AG

Link

https://www.mdpi.com/2072-666X/15/6/674/pdf

Reference24 articles.

1. MEMS inertial sensors: A tutorial overview;Shaeffer;IEEE Commun. Mag.,2013

2. A review of actuation and sensing mechanisms in MEMS-based sensor devices;Algamili;Nanoscale Res. Lett.,2021

3. Boosting MEMS piezoelectric transformer figures of merit via architecture optimization;Bedair;IEEE Electron Device Lett.,2018

4. MEMS actuators for biomedical applications: A review;Ghazali;J. Micromech. Microeng.,2020

5. Song, P., Ma, Z., Ma, J., Yang, L., Wei, J., Zhao, Y., and Wang, X. (2020). Recent progress of miniature MEMS pressure sensors. Micromachines, 11.

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