Combined Displacement and Angle Sensor with Ultra-High Compactness Based on Self-Imaging Effect of Optical Microgratings
Author:
Zhang Mengdi1, Yang Hao1, Niu Qianqi1, Zhang Xuye1, Yang Jiaan1, Lai Jiangbei1, Fan Changjiang1, Li Mengwei12, Xin Chenguang12ORCID
Affiliation:
1. School of Instrument and Electronics, North University of China, Taiyuan 030051, China 2. School of Instrument and Intelligent Future Technology, North University of China, Taiyuan 030051, China
Abstract
In this paper, an ultracompact combined sensor for displacement and angle-synchronous measurement is proposed based on the self-imaging effect of optical microgratings. Using a two-grating structure, linear and angular displacement can be measured by detecting the change of phase and amplitude of the optical transmission, respectively, within one single structure in the meantime. The optically transmitted properties of the two-grating structure are investigated in both theory and simulation. Simulated results indicate that optical transmission changes in a sinusoidal relationship to the input linear displacement. Meanwhile, the amplitude of the curve decreases with an input pitch angle, indicating the ability for synchronous measurement within one single compact structure. The synchronous measurement of the linear displacement and the angle is also demonstrated experimentally. The results show a resolution down to 4 nm for linear displacement measurement and a maximum sensitivity of 0.26 mV/arcsec within a range of ±1° for angle measurement. Benefiting from a simple common-path structure without using optical components, including reflectors and polarizers, the sensor shows ultra-high compactness for multiple-degrees-of-freedom measuring, indicating the great potential for this sensor in fields such as integrated mechanical positioning and semiconductor fabrication.
Funder
National Natural Science Foundation of China
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Reference29 articles.
1. Measurement technologies for precision positioning;Gao;CIRP Ann. Manuf. Technol.,2015 2. A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement;Kimura;Precis. Eng.,2012 3. Zheng, F., Feng, Q., Zhang, B., and Li, J. (2019). A Method for Simultaneously Measuring 6DOF Geometric Motion Errors of Linear and Rotary Axes Using Lasers. Sensors, 19. 4. Sun, C., Cai, S., Liu, Y., and Qiao, Y. (2020). Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors. Appl. Sci., 10. 5. Chang, D., Xing, X., Hu, P., Wang, J., and Tan, J. (2019). Double-Diffracted Spatially Separated Heterodyne Grating Interferometer and Analysis on its Alignment Tolerance. Appl. Sci., 9.
|
|