1. Microsystem & Terahertz Research Center, China Academy of Engineering Physics, Chengdu 610200, China
2. Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621999, China
3. Information Materials and Device Applications Key Laboratory of Sichuan Provincial Universities, Chengdu University of Information Technology, Chengdu 610225, China
4. School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China
5. State Key Laboratory of Low-Dimensional Quantum Physics, Department of Physics and Tsinghua-Foxconn Nanotechnology Research Center, Tsinghua University, Beijing 100084, China
6. Advanced Materials Division, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, China
7. Key Laboratory for Quantum Optics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China