Synthesis of the System Modeling and Signal Detecting Circuit of a Novel Vacuum Microelectronic Accelerometer

Author:

Li Dongling,Wen Zhiyu,Wen Zhongquan,He Xuefeng,Yang Yinchuan,Shang Zhengguo

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Reference16 articles.

1. A High-Precision, Wide-Bandwidth Micromachined Tunneling Accelerometer;Liu;J. Microelectromechan. Syst.,2001

2. A Novel Differential Piezoelectric Accelerating Sensor;Liu;J. Optics Precis. Eng.,2007

3. A Z-Axis Differential Capacitive SOI Accelerometer with Vertical Comb Electrodes;Toshiyuki;Sensor. Actuat. A-Phys.,2004

4. Research and Development of Vacuum Microelectronic Sensors;Xia;J. Mech. Stren.,2001

5. Finite Element Analysis on Vacuum Microelectronic Acceleration Sensor;Peng;J. Micronanoelectronic Technol.,2003

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