1. Zhuhai Fudan Innovation Institute of Fudan University, Guangdong-Macao in-Depth Cooperation Zone in Hengqin, Hengqin 518057, China
2. Laboratory of Physics of Interfaces and Thin Films, CNRS, Ecole Polytechnique, Institut Polytechnique de Paris, Route de Saclay, 91128 Palaiseau, France
3. Shandong Provincial Key Laboratory of Monocrystalline Silicon Semiconductor Materials and Technology, Shandong Universities Engineering Research Center of Integrated Circuits Functional Materials and Expanded Applications, College of Chemistry and Chemical Engineering, Dezhou University, Dezhou 253023, China