Positioning Performance of a Sub-Arc-Second Micro-Drive Rotary System

Author:

Yang Manzhi,Lv Zhenyang,Zhang Chuanwei,Yang Yizhi,Jing Gang,Guo Wei,Lu Zhengxiong,Huang Yumei,Wei Kaiyang,Li Linyue,Feng Bin,Ge Hongyu

Abstract

In the macro/micro dual-drive rotary system, the micro-drive system compensates for the position error of the macro-drive system. To realize the sub-arc-second (i.e., level of 1″–0.1″) positioning of the macro/micro dual-drive rotary system, it is necessary to study the positioning performance of the sub-arc-second micro-drive rotary system. In this paper, we designed a sub-arc-second micro-drive rotary system consisting of a PZT (piezoelectric actuator) and a micro rotary mechanism, and used simulation and experimental methods to study the positioning performance of the system. First, the micro-drive rotary system was developed to provide ultra-precise rotary motion. In this system, the PZT has ultrahigh resolution at a level of 0.1 nanometers in linear motion; a micro rotating mechanism was designed according to the composite motion principle of the flexible hinge, which could transform the linear motion of piezoelectric ceramics into rotating motion accurately. Second, the drive performance was analyzed based on the drive performance experiment. Third, kinematics, simulation, and experiments were carried out to analyze the transformation performance of the system. Finally, the positioning performance equation of the system was established based on the two performance equations, and the maximum rotary displacements and positioning error of the system were calculated. The study results showed that the system can provide precision motion at the sub-arc-second and good linearity of motion. This study has a certain reference value in ultra-precision positioning and micromachining for research on rotary motion systems at the sub-arc-second level.

Funder

National Natural Science Foundation of China

Natural Science Basic Research Program of Shaanxi Province

Key Research and Development Projects of Shaanxi Province

Science and Technology Plan Project of Xi’an City

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering

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