1. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2. University of Chinese Academy of Sciences, Beijing 100049, China
3. Center of Materials Science and Optoelectrics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
4. National Key Laboratory of Science and Technology on Vacuum Technology and Physics, Lanzhou Institute of Physics, Lanzhou 730000, China