MEMS Enabled Miniature Two-Photon Microscopy for Biomedical Imaging

Author:

Yu Xiaomin1,Zhou Liang2,Qi Tingxiang3,Zhao Hui34ORCID,Xie Huikai345ORCID

Affiliation:

1. Key Laboratory of Biological Effect of Physical Field and Instrument, Department of Electrical and Electronic Engineering, Chengdu University of Information Technology, Chengdu 610225, China

2. Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL 32611, USA

3. BIT Chongqing Institute of Microelectronics and Microsystems, Chongqing 401332, China

4. Foshan Lightview Technology Co., Ltd., Foshan 528000, China

5. School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China

Abstract

Over the last decade, two-photon microscopy (TPM) has been the technique of choice for in vivo noninvasive optical brain imaging for neuroscientific study or intra-vital microendoscopic imaging for clinical diagnosis or surgical guidance because of its intrinsic capability of optical sectioning for imaging deeply below the tissue surface with sub-cellular resolution. However, most of these research activities and clinical applications are constrained by the bulky size of traditional TMP systems. An attractive solution is to develop miniaturized TPMs, but this is challenged by the difficulty of the integration of dynamically scanning optical and mechanical components into a small space. Fortunately, microelectromechanical systems (MEMS) technology, together with other emerging micro-optics techniques, has offered promising opportunities in enabling miniaturized TPMs. In this paper, the latest advancements in both lateral scan and axial scan techniques and the progress of miniaturized TPM imaging will be reviewed in detail. Miniature TPM probes with lateral 2D scanning mechanisms, including electrostatic, electromagnetic, and electrothermal actuation, are reviewed. Miniature TPM probes with axial scanning mechanisms, such as MEMS microlenses, remote-focus, liquid lenses, and deformable MEMS mirrors, are also reviewed.

Funder

Sichuan Key Research and Development Project

Sichuan Science and Technology Program

Foshan Science and Technology Innovation Project

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering

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