Preparation of ZnO Ultrasonic Transducer by Radio-Frequency Sputtering and Its Application in Bolt Preload Detection

Abstract

Accurate detection of the preload force of tower crane bolts is of great significance for the stable and safe operation of the equipment. The method of contact ultrasonic detection of bolt preload has always been the focus of attention, which can realize rapid in situ detection without damaging the parts. In order to improve the accuracy and convenience of ultrasonic measurement of bolt preload and meet the urgent needs of the actual industrial site for high-precision measurement of bolt preload, we propose to prepare ZnO piezoelectric coatings as functional layers for ultrasonic transducers using magnetron sputtering and deposit them directly on bolts. The growth behavior of the ZnO coatings is investigated by varying the sputtering power, sputtering gas pressure and target substrate distance, and the morphology, structure, and properties are characterized and analyzed. The ZnO piezoelectric coatings with high c-axis optimal growth orientation and excitation of ultrasonic longitudinal waves were finally obtained and verified to be effective and stable when applied to the bolts.