1. School of Electronic and Information Engineering, Zhuhai College of Science and Technology, Zhuhai 519041, China
2. Zhejiang Engineering Research Center of MEMS, Shaoxing University, Shaoxing 312000, China
3. Zhuhai South Integrated Circuit Design Center, Zhuhai 519041, China
4. United Nova Technology Co., Ltd., Shaoxing 312000, China