Affiliation:
1. Consiglio Nazionale delle Ricerche (CNR), Institute for Microelectronmics and Microsystems (IMM) Via del Fosso del Cavaliere 100, 00133 Rome, Italy
Abstract
In our world dominated by global communications, data centers, travels and environmental concerns, there is an increasing need for the deposition of materials with competitive quality, thruput, and relatively low cost/impact, to be implemented in smart devices capable of integrating complex systems, such as the emerging Internet of Things (IoT) [...]
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces
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