Ultra-High-Sensitivity and -Stability Thin-Film Heat Flux Sensor Based on Transverse Thermoelectric Effect

Abstract

In this study, we investigate the sensitivity properties of YBa2Cu3O7-δ thin films with a 15° tilting angle in relation to heat flux density. The films were prepared using the laser pulsed deposition (PLD) technique, and their characteristics were evaluated using various techniques, including X-ray diffraction (XRD), transmission electron microscopy (TEM), atomic force microscopy (AFM), and infrared steady-state and laser transient calibration systems. The YBa2Cu3O7-δ films prepared in this study were found to be of good quality, exhibiting a single-phase structure with strict (001) orientation. Both the substrate and film diffraction peaks were sharp and consistent with the step-flow growth mode, indicating high crystalline quality. Ultra-high sensitivity in the range of 0 to 100 kW/m2, the maximum sensitivity is 230 μV/(kW/m2), and an uncertainty is only 3%. According to the infrared steady-state heat flux calibration system test, when the single output power of the quartz lamp array is 0.2 kW, 0.3 kW, 0.4 kW and 0.5 kW, the maximum output voltage is 0.19 mV, 0.41 mV, 0.63 mV and 0.94 mV, respectively, indicating that the output voltage of the sensor increases with the increase in heat flux, showing a good linear characteristic, and the fitting linearity is 0.99. Through the test of the laser transient thermal current calibration system, the sensors are found to have excellent response–recovery characteristics at 500 kHz and 1000 kHz fiber laser frequencies, and the maximum voltage output is 8.83 mV and 9.09 mV, respectively. Moreover, the component has excellent repeatability, and the maximum measurement error is only 1.94%. Our findings demonstrate the potential of YBa2Cu3O7-δ thin films for use in heat flux sensing applications.