High Temperature Wear Behavior of Titanium Nitride Coating Deposited Using High Power Impulse Magnetron Sputtering

Abstract

Titanium nitride (TiN) coating has been used in various application as it gives excellent performance in many aspects. It has been proven to prolong machining tool life since the mid-1960s. Industrial deposition processes of TiN, including magnetron sputtering, arc ion plating, and chemical vapor depositions, have their individual advantages and limitations. Due to the rising demands of the dry machining technique, the massive amount of heat generated from the friction of cutting tools against the surface of a work piece has become the main issue to overcome. Oxidation of TiN, which occurs around 400 °C, puts a limit on the applications of the coatings. Comparing TiN tool coatings deposited by arc evaporation, the novel high-power impulse magnetron sputtering (HiPIMS) technology provides smoother film surface, denser structure and subsequent corrosion resistance. Therefore, this research aims to investigate the wear behavior of TiN thin film deposited by HiPIMS at high temperature. The influences of the coating properties on the wear resistance of coatings at high temperature are also investigated. The results show that the HiPIMS technique enables a denser epitaxial-grown TiN coating with higher surface hardness and adhesion in contrast with TiN coating deposited using direct current (DC) magnetron sputtering techniques, which provides a higher wear resistance.