Thickness Distribution Measurement for Spin-Coated and Inkjet-Printed Transparent Organic Layers Using a UV Light Extinction Image Method

Abstract

Organic thin layers are highlighted as crucial components of flexible and printed electronic products due to their ability to provide mechanical flexibility in various applications, such as flexible displays and wearable electronics. The thickness and uniformity of these layers are crucial factors that influence surface planarization, mechanical stress relief, and the enhancement of optical performance. Therefore, accurate measurement of their thickness distribution is essential. In this study, the two-dimensional thickness distributions of spin-coated and inkjet-printed organic microlayers on glass substrates were measured using a light extinction image method. Using a 300 nm wavelength light source and a camera, images with an area of 4872 × 3640 μm2 and an XY resolution of 3.5 μm were obtained through single measurements. The precision of the measured thickness could be enhanced to several nanometers through pixel binning and image overlaying. Using this light extinction measurement system, we measured and analyzed the thickness distribution of the center and edge of the spin-coated and inkjet-printed organic layers with thicknesses of several micrometers.