Temperature–Power Simultaneous Effect on Physical Properties of BaxSr1−x TiO3 Thin Films Deposited by RF–Magnetron Cosputtering for 0 ≤ x ≤1

Abstract

The combined effect on the variation of the in-situ deposition temperature and the variation of the applied power on the deposition rate (DR), gap energy (Eg), and resistivity (ρ) in barium strontium titanate thin films, deposited into RF (radio frequency)–magnetron cosputtering equipment, are presented in this research. The simultaneous action of two magnetrons (BaTiO3 and SrTiO3) is explained using the first and second derivative of Boltzmann’s sigmoidal equation. This found that a deposition gradient is a very novel analysis. Using the color-code lines built through MATLAB® and analyzing the trend information, taking into account the influence of the calculated “x” parameter, by means of the Boltzmann’s sigmoidal equation fit, we propose a method to set up an RF–magnetron cosputtering system to predict the DR(x,T), Eg(x,T), and ρ(x,T) values of BaxSr1−xTiO3 solid solutions with 0 ≤ x ≤ 1 for amorphous and crystalline phases. This method can be a versatile tool to optimize the deposition process with, or without, in situ deposition temperature.