Photocatalytic Activity in the In-Flow Degradation of NO on Porous TiO2–Coated Glasses from Hybrid Inorganic–Organic Thin Films Prepared by a Combined ALD/MLD Deposition Strategy

Abstract

A combined ALD/MLD (where ALD and MLD stand for atomic and molecular layer deposition, respectively) deposition strategy using TiCl4, H2O and HQ (hydroquinone) as precursors has been applied for the preparation of inorganic–organic thin films on soda-lime glasses. The alternate deposition of TiO2 layers, by pulsing TiCl4/H2O (ALD), and hybrid layers, using TiCl4/HQ (MLD), results in the formation of thin films that are precursors for porous TiO2-coatings after removal of the HQ template by annealing. The coated-glassed show good photocatalytic activity in the degradation of NO with up to 15% reduction of NO concentration in three successive photocatalytic cycles of 5 h each. Surface Scanning Electron Microscopy (SEM) images show that the TiO2-coating is composed of large grains that are made up of finer subgrains resulting in a porous structure with an average pore size of 3–4 nm. Transmission Electron Microscopy (TEM) images show two regions, a porous columnar structure on top and a denser region over the glass substrate. Energy Dispersive X-Ray (EDX) analysis, nanocrystal electron diffraction and Raman spectroscopy confirm the presence of the anatase phase, which, together with the porosity of the material, accounts for the observed photocatalytic activity.