Broadband High-Reflection Dielectric PVD Coating with Low Stress and High Adhesion on PMMA

Abstract

Polymethyl methacrylate (PMMA) is an attractive optical plastic that is widely used in augmented reality, virtual reality devices, display, wearable devices, portable optical equipment, and lightweight optics. Thin film prepared by physical vapor deposition (PVD) is the primary choice of coating on PMMA. However, it faces problems with coating adhesion and stress. In this paper, we analyze the problems existing in the current PMMA high-reflection (HR) coating in detail and propose a way to effectively solve issues with bonding force and stress. Based on the current research background, the bonding force was enhanced by introducing a special hard coating as the connection layer between the dielectric film and the substrate. After comparing the stresses of different coating materials and material combinations, the optimal combination of Nb2O5 and SiO2 was determined, and the requirements were successfully prepared. An HR coating that satisfies requirements, with low stress and excellent environmental adaptability, was successfully prepared. Based on this, a broadband HR coating from 750 to 1550 nm was formed on the surface of PMMA by adjusting the partial pressure of oxygen.