Evaluation of Transparent ITO/Nano-Ag/ITO Electrode Grown on Flexible Electrochromic Devices by Roll-to-Roll Sputtering Technology

Abstract

This paper explores the flexible ITO/nano-Ag/ITO multilayer electrodes grown on polyethylene terephthalate (PET) substrates and processed by a continuous roll-to-roll (R2R) sputtering system at room temperature used for flexible electrochromic device (ECD) applications. The effect of the nano-Ag interlayer thickness on the electrical and optical properties of the flexible ITO/nano-Ag/ITO multilayer was thoroughly investigated. By using R2R-sputtered at an Ag DC power of 0.2 kW, we were able to achieve optimal ITO/nano-Ag/ITO multilayer that exhibits a high optical transmittance of 87.19% and the best figure of merit value (30.93 × 10−3 Ω−1). The EC performance and stability of the flexible devices were tested by a cathodic WO3 coloration. Coloring and bleaching tests show that ITO/nano-Ag/ITO multilayers are highly effective conductors, indicating that the R2R sputtering technique is a promising continuous sputtering process in preparing for the fabrication of optical devices and flexible electronics industries.