Abstract
Currently, pulsed laser deposition (PLD) is a widely used technique to grow thin films for academic research and for industrial applications. The PLD has superior advantages including versatility, control over the growth rate, stoichiometric transfer and unlimited degree of freedom in the ablation geometry compared to other deposition techniques. The primary objective of this review is to revisit the basic operation mechanisms of the PLD and discuss recent modifications of the technique aimed at enhancing the quality of thin films. We also discussed recent progress made in the deposition parameters varied during preparation of luminescent inorganic oxide thin films grown using the PLD technique, which include, among others, the substrate temperature. The advanced technological applications and different methods for film characterization are also discussed. In particular, we pay attention to luminescence properties, thickness of the films and how different deposition parameters affect these properties. The advantages and shortcomings of the technique are outlined.
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces
Reference111 articles.
1. Vacuum Deposited Thin Films Using a Ruby Laser
2. Preparation of Y‐Ba‐Cu oxide superconductor thin films using pulsed laser evaporation from highTcbulk material
3. Symposium I: Recent Advances in the Pulsed Laser Deposition of Thin Films and Nanostructures, MRS Singapore ICMAT Symposia Proceedings, Procedia Engineering,2013
4. Pulsed laser deposition of complex materials: Progress towards applications;Norton,2007
5. Pulsed Laser Deposition (PLD) -- A Versatile Thin Film Technique
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