Porous CaP Coatings Formed by Combination of Plasma Electrolytic Oxidation and RF-Magnetron Sputtering

Abstract

The porous CaP subcoating was formed on the Ti6Al4V titanium alloy substrate by plasma electrolytic oxidation (PEO). Then, upper coatings were formed by radio frequency magnetron sputtering (RFMS) over the PEO subcoating by the sputtering of various CaP powder targets: β-tricalcium phosphate (β-TCP), hydroxyapatite (HA), Mg-substituted β-tricalcium phosphate (Mg-β-TCP) and Mg-substituted hydroxyapatite (Mg-HA), Sr-substituted β-tricalcium phosphate (Sr-β-TCP) and Sr-substituted hydroxyapatite (Sr-HA). The coating surface morphology was studied by scanning electron and atomic force microscopy. The chemical composition was determined by X-ray photoelectron spectroscopy. The phase composition of the coatings was studied by X-ray diffraction analysis. The Young’s modulus of the coatings was studied by nanoindentation test. RF-magnetron sputtering treatment of PEO subcoating resulted in multileveled roughness, increased Ca/P ratio and Young’s modulus and enrichment with Sr and Mg. Sputtering of the upper layer also helped to adjust the coating crystallinity.