1. School of Materials Science and Engineering, Shanghai University, 333 Nanchen Road, Shanghai 200444, China
2. Shanghai Huali Integrated Circuit Corporation, 6 Liangteng Road, Pudong New Area, Shanghai 201314, China
3. Chongqing Genori Technology Co., Ltd., No.66, Sendi Avenue, Xipeng Town, Jiulongpo District, Chongqing 401326, China
4. Shanghai Collaborative Innovation Center of Intelligent Sensing Chip Technology, Shanghai 201800, China
5. Zhejiang Institute of Advanced Materials, Shanghai University, Jiashan 314113, China