Investigation of Optical Properties of Complex Cr-Based Hard Coatings Deposited through Unbalanced Magnetron Sputtering Intended for Real Industrial Applications

Abstract

A preliminary investigation of the optical properties of complex Cr-based hard coatings and their connection with the compound structure of the coatings is presented. Cr/CrN, Cr/CrN/CrAlN, Cr/CrN/CrTiAlN, and Cr/CrN/CrAlTiN coating structures were deposited through unbalanced magnetron sputtering. Their mechanical properties, especially nanohardness, coefficient of friction, and adhesion, were measured. The structure and composition of the coatings were characterised through SEM, FIB, XPS, and TEM. Their optical properties were investigated by UV-VIS ellipsometry. The optical parameters’ phase difference Δ, the amplitude ratio Ψ, the frequency-dependent real (ε1(ω)) and imaginary (ε2(ω)) part of the dielectric function, and the corresponding refractive and extinction indexes n(ω) and k(ω) were measured and modelled via regression analysis implemented using the WVASE© software version 3.686. Satisfactory coincidence was achieved between the measured optical data and the corresponding fitting models. The physical polycrystalline optical constants of the industrial samples were extracted from modelling data with roughness. The analysis of the data showed that ellipsometric characterisation can be used in order to determine the physical properties of Cr-based hard coatings with complex structure and composition, as well as for repeatability control of the deposition process. However, more detailed research is needed to predict the composition based on measured optical properties.