Abstract
Linear sliders are linear actuators using linear motors. It is used in many applications, such as factory lines and linear motor cars. In recent years, the demand for smaller semiconductor devices has been increasing due to the proliferation of smartphones. High-precision positioning of linear motors is needed because manufacturing semiconductor devices uses the stage with linear motors. However, linear motors have nonlinearity due to the position dependence of interlinkage flux. It affects precise positioning. In this study, the nonlinear characteristics due to the position dependence of the flux are expressed as a mathematical model by using a distributed constant magnetic circuit. A method compensating it using an operator-based feedback controller with the obtained mathematical model is proposed. The effectiveness of the proposed method is confirmed by simulating and experimenting with the reference following disturbance elimination.
Subject
Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Control and Optimization,Mechanical Engineering,Computer Science (miscellaneous),Control and Systems Engineering
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