A (Bio-)Chemical Field-Effect Sensor with Macroporous Si as Substrate Material and a SiO2 / LPCVD-Si3N4 Double Layer as pH Transducer-Reference-Cited by-同舟云学术

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A (Bio-)Chemical Field-Effect Sensor with Macroporous Si as Substrate Material and a SiO2 / LPCVD-Si3N4 Double Layer as pH Transducer

Published:2002-01-15 Issue:1 Volume:2 Page:11-22
ISSN:1424-8220
Container-title:Sensors
language:en
Short-container-title:Sensors

Author:

Schöning Michael,Simonis Anette,Ruge Christian,Ecken Holger,Müller-Veggian Mattea,Lüth Hans

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry

Link

http://www.mdpi.com/1424-8220/2/1/11/pdf

Reference13 articles.

1. Porous silicon as a substrate material for potentiometric biosensors

2. Miniaturization of potentiometric sensors using porous silicon microtechnology

3. Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors

4. A novel capacitor technology based on porous silicon

5. Capacitive microsensors for biochemical sensing based on porous silicon technology

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