A Microlens Array Grating for Miniature Multi-Channel Spectrometers
Author:
Shan Shuonan1, Li Jingwen12, Liu Peiyuan1, Li Qiaolin1, Wang Xiaohao12, Li Xinghui12
Affiliation:
1. Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China 2. Tsinghua-Berkeley Shenzhen Institute, Tsinghua University, Shenzhen 518055, China
Abstract
Most existing multi-channel spectrometers are constructed by physically stacking single-channel spectrometers, resulting in their large size, high weight, and limited number of channels. Therefore, their miniaturization is urgently needed. In this paper, a microlens array grating is designed for miniature multi-channel spectrometers. A transmissive element integrating microlens arrays and gratings, the MLAG, enables simultaneous focusing and dispersion. Using soft lithography, the MLAG was fabricated with a deviation of less than 2.2%. The dimensions are 10 mm × 10 mm × 4 mm with over 2000 available units. The MLAG spectrometer operates in the 400–700 nm wavelength range with a resolution of 6 nm. Additionally, the designed MLAG multi-channel spectrometer is experimentally verified to have independently valid cells that can be used in multichannel spectrometers. The wavelength position repeatability deviation of each cell is about 0.5 nm, and the repeatability of displacement measurements by the chromatic confocal sensor with the designed MLAG multi-channel spectrometer is less than 0.5 μm.
Funder
Shenzhen Stable Supporting Program National Natural Science Foundation of China Basic and Applied Basic Research Foundation of Guangdong Province Tsinghua University
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
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