Finite Element Simulation of Multi-Pass Rolling of a Pure Aluminum Target under Different Rolling Routes and Methods

Abstract

By coordinating the rolling direction and mode, a multi-rolling plastic deformation process for an aluminum (Al) sputter target is proposed to achieve multiple excellent properties, including a uniform and fine grain structure and low defect risk, which are significant in producing high-quality sputtered films. In this work, therefore, DEFORM 3D 10.2 software is adopted to establish three strategies, clock-synchronous rolling, cross-synchronous rolling, and clock–snake rolling. The effect of different rolling routes and modes on the metal flow velocity (MFV), effective strain distribution (ESD), grain size distribution (GSD), damage, and rolling force (RF) are comparatively investigated. The simulation results show that clock–snake rolling can increase the MFV and effective strain by producing a deeper deformation than the others. It provides sufficient energy for dynamic recrystallization to promote grain refinement. In combination with the microstructure homogeneity promoted by the clock rolling route, the GSD from 6.5 to 44.3 μm accounts for about 80.5% of all the grains because of the fact that a randomly oriented grain region is full of high-angle grain boundaries. Compared with the synchronous rolling mode, the decrement in RF maximum reaches up to 51% during the asynchronous rolling process because component energy is consumed to form cross-sheering stress. It remarkably reduces the risk of defects, with a damage value of less than 73%, and simultaneously improves energy efficiency owing to smaller and uniform grains caused by less RF. The results obtained in this work are of great significance as they can guide practical production in the metal target industry.