The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid-Reference-Cited by-同舟云学术

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The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid

Published:2016-12-14 Issue:12 Volume:7 Page:231
ISSN:2072-666X
Container-title:Micromachines
language:en
Short-container-title:Micromachines

Author:

Chen Da,Ren Wenwen,Song Shuren,Wang Jingjing,Liu Weihui,Wang Peng

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering

Link

http://www.mdpi.com/2072-666X/7/12/231/pdf

Reference17 articles.

1. Flexible structured high-frequency film bulk acoustic resonator for flexible wireless electronics

2. An Intrinsically Switchable Ladder-Type Ferroelectric BST-on-Si Composite FBAR Filter

3. Detection of Volatile Organic Compounds Using Microfabricated Resonator Array Functionalized with Supramolecular Monolayers

4. Kinetic studies of microfabricated biosensors using local adsorption strategy

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1. Experimental validation of multiferroic antennas in GHz frequency range;Applied Physics Letters;2023-10-16

2. Surface acoustic wave based microfluidic devices for biological applications;Sensors & Diagnostics;2023

3. Temperature Characteristics of a Contour Mode MEMS AlN Piezoelectric Ring Resonator on SOI Substrate;Micromachines;2021-01-29

4. High Q Lateral-Field-Excited Bulk Resonator Based on Single-Crystal LiTaO₃ for 5G Wireless Communication;IEEE Journal of the Electron Devices Society;2021

5. Active area optimisation of film bulk acoustic resonator for improving performance parameters;Electronics Letters;2020-09-14

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