Abstract
Micro and smart devices and systems are small, interconnected devices and systems that are designed to be highly functional, efficient, and convenient [...]
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Reference23 articles.
1. A Mems Resonant Accelerometer with High Relative Sensitivity Based on Sensing Scheme of Electrostatically Induced Stiffness Perturbation;Ding;J. Microelectromech. Syst.,2020
2. Xie, J., Lee, C., Wang, M.-F., Liu, Y., and Feng, H. (2009). Characterization of Heavily Doped Polysilicon Films for Cmos-Mems Thermoelectric Power Generators. J. Micromech. Microeng., 19.
3. Eccentric Actuator Driven by Stacked Electrohydrodynamic Pumps;Mao;J. Zhejiang Univ. Sci. A,2022
4. Gridling, G., and Weiss, B. (2022, January 01). Introduction to Microcontrollers. Vienna University of Technology Institute of Computer Engineering Embedded Computing Systems Group. Available online: https://www.skylineuniversity.ac.ae/pdf/software-engineering/Microcontroller.pdf.
5. The Internet of Things: A Survey;Li;Inf. Syst. Front.,2015