A Compact Linear Ultrasonic Motor Composed by Double Flexural Vibrator

Abstract

A minimized linear ultrasonic motor was proposed, and two flexural bimorph vibrators were utilized to form its stator. The construction of the linear ultrasonic motor and its operation principle was introduced. Two working modes with the same local deformation distribution were chosen on the basis of Finite Element Analysis (FEA). To obtain its optimized structural parameters, sensitivities on frequency difference were calculated, and a way of decreasing the frequency difference of two working modes was introduced. A prototype of the optimized model was made. The modal testing of the stator and its performance evaluation was conducted. The modal testing results were in good agreement with that of the simulation. The maximum speed of the prototype is 245 mm/s, and its maximum thrust is 1.6 N.