Author:
Kim Dong-Woo,Cho Myeong-Woo,Seo Tae-il,Lee Eung-Sug
Subject
Electrical and Electronic Engineering,Biochemistry,Instrumentation,Atomic and Molecular Physics, and Optics,Analytical Chemistry
Reference9 articles.
1. Silicon Micromachining Technology and Industrial MEMS Applications;Cheong;International Journal of Machine Tools and Manufacture,1999
2. Micro-Drilling of Monocrystalline Silicon using a Cutting Tool;Egashira;Journal of the International Societies for Precision Engineering and Nanotechnology,2002
3. Automation of Centered Micro Hole Drilling using a Magnetically Levitated Table;Higuchi;International Journal of Machine Tools and Manufacture,1999
4. Development of Curved Helical Micro-Drilling Point Technology for Micro-Hole Drilling;Chyan;Mechatronics,1998
5. Study for Increasing Micro-Drill Reliability by Vibrating Drilling;Zhaojun;Reliability Engineering and System Safety,1998
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19 articles.
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