Design and Optimization of an S-Band MEMS Bandpass Filter Based on Aggressive Space Mapping
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Published:2022-12-27
Issue:1
Volume:14
Page:67
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ISSN:2072-666X
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Container-title:Micromachines
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language:en
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Short-container-title:Micromachines
Author:
Wu Qiannan,Gao Xudong,Shi Zemin,Li Jing,Li Mengwei
Abstract
Aggressive space mapping (ASM) is a common filter simulation and debugging method. It plays an important role in the field of microwave device design. This paper introduces ASM and presents the design and fabrication of a compact fifth-order microstrip interdigital filter with a center frequency of 2.5 GHz and a relative bandwidth of 10% using ASM. The filter used a double-layer silicon substrate structure and stepped impedance resonators (SIRs) and was optimized by ASM. After five iterations, the filter achieved the design specification, which greatly improves the efficiency of the filter design compared with the traditional method. It was fabricated on high-resistance silicon wafers by micro-electro-mechanical systems (MEMSs) technology, and the final size of the chip is 9.5 mm × 7.6 mm × 0.8 mm. The measurement results show that the characteristics of the filter are similar to the simulation results, which also shows the efficiency and precision of the ASM algorithm.
Funder
Shanxi Province Postgraduate Education Reform Project Equipment Development Department New Product Project “Double First-Class” disciplines National first-class curriculum construction, and National Future Technical College Construction National Future Technical College Construction Project
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
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