Abstract
In this research, effects of ambient temperature (−100 °C–200 °C) on nanosecond laser micro-drilling of polydimethylsiloxane (PDMS) was investigated by simulation and experiment. A thermo-mechanical coupled model was established, and it was indicated that the top and bottom diameter of the micro-hole decreased with the decrease of the ambient temperature, and the micro-hole taper increased with the decrease of the ambient temperature. The simulation results showed a good agreement with the experiment results in micro-hole geometry; the maximum prediction errors of the top micro-hole diameter, the bottom micro-hole diameter and micro-hole taper were 2.785%, 6.306% and 9.688%, respectively. The diameter of the heat-affected zone decreased with the decrease of the ambient temperature. The circumferential wrinkles were controlled by radial compressive stress. As the ambient temperature increased from 25 °C to 200 °C, the radial compressive stress gradually decreased, which led to the circumferential wrinkles gradually evolving in the radial direction. This work provides a new idea and method based on ambient temperature control for nanosecond laser processing of PDMS, which provides exciting possibilities for a wider range of engineering applications of PDMS.
Funder
National Natural Science Foundation of China
Guangdong Basic and Applied Basic Research Foundation
Guangdong Provincial Key Laboratory of Digital Manufacturing Equipment
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering