Removal Modeling and Experimental Verification of Magnetorheological Polishing Fused Silica Glass

Abstract

Compared to conventional polishing methods, magnetorheological polishing has no subsurface damage and a has good polishing effect, which is suitable for fused silica glass surface processing. However, the existing magnetorheological polishing material removal model has low processing efficiency and uneven removal, which cannot realize the deterministic processing of parts. The material removal (MR) model of fused silica glass is established by convolving the dwell time with the material removal function. The residence time is Fourier transformed. The consequence of process variable such as machining time, workpiece rotational frequency, machining gap and X-direction deflection on the MR of workpiece interface are analyzed. Experiments verify the validity of the material removal model. The surface precision PV value of the workpiece surface under the optimal process parameters was decreased from 7.959 nm to 0.609 nm for machining. The experiment results indicate that the established MR model can be implemented as the deterministic MR of the optical surface and ameliorate the surface accuracy of the workpiece surface.