Fabrication and Characterization of In0.53Ga0.47As/InAs/In0.53Ga0.47As Composite Channel Metamorphic HEMTs (mHEMTs) on a GaAs Substrate

Author:

Shin Seung HeonORCID,Shim Jae-Phil,Jang Hyunchul,Jang Jae-HyungORCID

Abstract

In this work, we successfully demonstrated In0.53Ga0.47As/InAs/In0.53Ga0.47As composite channel metamorphic high electron mobility transistors (mHEMTs) on a GaAs substrate. The fabricated mHEMTs with a 100 nm gate length exhibited excellent DC and logic characteristics such as VT = −0.13 V, gm,max = 949 mS/mm, subthreshold swing (SS) = 84 mV/dec, drain-induced barrier lowering (DIBL) = 89 mV/V, and Ion/Ioff ratio = 9.8 × 103 at a drain-source voltage (VDS) = 0.5 V. In addition, the device exhibited excellent high-frequency characteristics, such as fT/fmax = 261/304 GHz for the measured result and well-matched modeled fT/fmax = 258/309 GHz at VDS = 0.5 V, which is less power consumption compared to other material systems. These high-frequency characteristics are a well-balanced demonstration of fT and fmax in the mHEMT structure on a GaAs substrate.

Funder

National R&D Program through the National Research Foundation of Korea (NRF), funded by the Ministry of Science and ICT

Nanomaterial Technology Development Program through the National Research Foundation of Korea (NRF), funded by the Ministry of Science, ICT, and Future Planning

Publisher

MDPI AG

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering

Reference22 articles.

1. Jo, H.-B., Yun, S.-W., Kim, J.-G., Yun, D.-Y., Lee, I.-G., Kim, D.-H., Kim, T.-W., Kim, S.-K., Yun, J., and Kim, T. (2020, January 12–18). Lg = 19 nm In0.8Ga0.2As composite-channel HEMTs with ft = 738 GHz and fmax = 492 GHz. Proceedings of the 2020 IEEE International Electron Devices Meeting (IEDM), San Francisco, CA, USA.

2. 30-nm InAs PHEMTs With fT = 644 GHz and fmax = 681 GHz;Kim;IEEE Electron Device Lett.,2010

3. First Demonstration of amplification at 1 THz using 25-nm InP high electron mobility transistor process;Mei;IEEE Electron Device Lett.,2015

4. Shin, C.-S., Park, W.-K., Shin, S.H., Cho, Y.D., Ko, D.H., Kim, T.-W., Koh, D.H., Kwon, H.M., Hill, R.J., and Kirsch, P. (2014, January 9–12). Sub-100 nm regrown S/D gate-last In0.7Ga0.3As QW MOSFETs with μn, eff > 5,500 cm2/v-S. Proceedings of the 2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers, Honolulu, HI, USA.

5. Jo, H.-B., Lee, I.-G., Baek, J.-M., Lee, S.T., Choi, S.-M., Kim, H.-J., Jeong, H.-S., Park, W.-S., Yoo, J., and Lee, H.-Y. (2022, January 12–17). Lg = 130 nm GAA MBCFETs with three-level stacked In0.53Ga0.47As nanosheets. Proceedings of the 2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), Honolulu, HI, USA.

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