1. School of Microelectronics, Shanghai University, Shanghai 201800, China
2. Shanghai Industrial Technology Research Institute (SITRI), Shanghai 201800, China
3. Shanghai Si-Gene Biotechnology Co., Ltd., Shanghai 201800, China
4. State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
5. Shanghai Academy of Experimental Medicine, Shanghai 200052, China