1. School of Instrument and Electronics, North University of China, Taiyuan 030051, China
2. The Academy for Advanced Interdisciplinary Research, North University of China, Taiyuan 030051, China
3. The Center for Microsystem Integration, North University of China, Taiyuan 030051, China
4. School of Semiconductor and Physics, North University of China, Taiyuan 030051, China