1. College of Physics and Optoelectronic Engineering, Ludong University, Yantai 264025, China
2. School of Integrated Circuits, Ludong University, Yantai 264025, China
3. Engineering Research Center of Photodetector Special Chip in Universities of Shandong, Ludong University, Yantai 264025, China
4. School for Optoelectronic Engineering, Zaozhuang University, Zaozhuang 277160, China
5. Institute of Microelectronics, Chinese Academy of Sciences (IMECAS), Beijing 100029, China
6. School of Physics and Physical Engineering, Qufu Normal University, Qufu 273165, China