Abstract
The 6-DOF vibration isolation platform (VIP) is used to isolate vibration in the processing and manufacturing of semiconductor chips, especially electric vehicle chips. The 6-DOF VIP has the characteristics of high position accuracy, fast dynamic response, and short motion travel. In this paper, a novel four-quadrant Lorentz force motor (FQLFM) applied on the 6-DOF VIP is proposed. The structure of this LFM has a high force density, low force fluctuation, and low coupling force. First, the basic structure and operating principle of the proposed FQLFM are presented. Secondly, the expressions of the magnetic field and electromagnetic force are obtained based on an equivalent current model and the permanent magnet mirror-image method (PMMIM). Thirdly, the magnetic field and electromagnetic force characteristics of the proposed FQLFM and an LFM with a traditional bilateral structure are analyzed and compared. The relationship between the force and displacement of the FQLFM is investigated. Moreover, the PMMIM is verified by a 3D finite element analysis (FEA). Finally, the experimental platform for a force test is built and the above results are validated by an experiment.
Funder
National Key R&D Program of China
Subject
Energy (miscellaneous),Energy Engineering and Power Technology,Renewable Energy, Sustainability and the Environment,Electrical and Electronic Engineering,Control and Optimization,Engineering (miscellaneous),Building and Construction
Reference23 articles.
1. Maurya, S.K., Galvan, H.R., Gautam, G., and Xu, X. (2022). Recent progress in transparent conductive materials for photovoltaics. Energies, 15.
2. Zhou, Y., Kou, B., Zhang, H., Zhang, L., and Wang, L. (2019). Design, Analysis and Test of a Hyperbolic Magnetic Field Voice Coil Actuator for Magnetic Levitation Fine Positioning Stage. Energies, 12.
3. Vibration transmission characteristics against vertical vibration in magnetic levitation type HTS seismic/vibration isolation device;Tsuda;IEEE Trans. Appl. Supercond.,2009
4. An Explanation for Observed Flux Creep in Opposite Direction to Lorentz Force in Partially Magnetized Bulk Superconductors;Ainslie;IEEE Trans. Appl. Supercond.,2019
5. Overview of structure optimization and application of voice coil motor;Chai;Trans. China Electrotech. Soc.,2021